Kinematic analysis of a compliant microplatform

Julio Correa, Carl Crane, Huikai Xie

    Research output: Chapter in Book/Report/Conference proceedingConference and proceedingspeer-review

    Abstract

    Mechanisms formed by rigid elements are not suitable for applications at the microlevel due to manufacturing limitations. For the same reason, devices for microelectromechanical systems (MEMS) are basically planar mechanisms. This paper addresses a microplatform able to move in the three dimensional space. It is formed by bimorph actuators connected to the central platform by compliant elements. The forward and reverse analyses for the microplatform are presented.

    Original languageEnglish
    Title of host publication2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
    Pages331-338
    Number of pages8
    EditionPART A
    StatePublished - 2009
    Event2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008 - New York City, NY, United States
    Duration: 3 Aug 20086 Aug 2008

    Publication series

    Name2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
    NumberPART A
    Volume2

    Conference

    Conference2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
    Country/TerritoryUnited States
    CityNew York City, NY
    Period3/08/086/08/08

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